Abstract Submission

To Submit an Abstract

  • Abstracts must be written and presented in English.
  • All abstracts must be submitted electronically in a PDF File via this symposium website. No fax and e-mail submission are accepted.
  • Deadline: November 30, 2020 December 7, 2020 (extended) Please note: the electronic abstract submission system will be closed on December 7, 2020 and late abstracts will not be accepted.
  • You will receive your reference number in return by e-mail when the submission succeeded. If you do not receive a response within 24 hours, please contact the Abstract Submission Office.

Instructions to Authors for the Preparation of your Abstract

Please click here to download “Abstract Template 2021”.
This describes instructions for the preparation of an abstract and can be used as a template.

All abstracts must contain the following information

1. Title of Abstract:
The title of the abstract should be written in Times New Roman, bold, 16pt, centered. Initial letters of each word should be capitalized.
2. Names of All Authors:
Author's name and affiliation spelled out completely in Times New Roman, 12pt, centered. Initial letters of each word must be capitalized. If there are several authors or affiliations, Presenting Author should be listed first and the related numbers should be given using superscripts. Also include the mailing address, and email address.
3. Abstract Text and Figures:
Text should be approximately 250 words, not exceeding one A4 page including figures.
4. Keywords:
List maximum of five keywords. Please choose at least one keyword for your abstract.


From 2019, the one-page abstract which will be submitted by December 7 basically will be used for “Photomask Japan 2021 Digest of Papers”.

Please keep in mind that No Camera-ready Abstract is needed.

  • * It is possible to replace the accepted abstract to the revised one for “Digest of Papers” no later than February 16, 2021. How to submit the revised abstract will be notified in the middle of January 2021.


You are requested to choose topic applicable to your abstract from among the items listed in the Themes and Topics below.

  1. Materials for photomasks
  2. Fabrication process steps and equipment for photomasks
    (developing, etching, cleaning etc.)
  3. Photomask writing tools and technologies including multi-beam EB writer
  4. Tools and technologies for metrology/ inspection/ repair
  5. Technologies and Infrastructures for EUVL masks
  6. Technologies and Infrastructures for NIL masks
  7. Technologies and Infrastructures for FPD masks
  8. EDA, MDP, curvilinear ILT and DTCO
  9. Photomasks with RET: PSM, OPC, SMO and multiple patterning
  10. Photomask-related lithography technologies
  11. NGL mask technologies and their applications: DSA and others
  12. Strategy and business challenges: cost, cycle time and total mask solutions
  13. Patterning technologies for semiconductor and electronic devices
  14. Semiconductor manufacturing technologies
  15. eBeam direct writing and eBeam lithography technologies
  16. Photomask and lithography related technologies in academia

Photomask and Lithography related Technology in Academia

PMJ offers an opportunity for university students or postdoctoral researchers to present their works on mask/lithography technology fields.
Those who wish to present their works need to submit an abstract via online in accordance with the above.

Session Scope:
Mask technology, lithography technology and applications
Object Presenter:
Applicants should be university students or postdoctoral researchers
Registration fee:
Free for Academia

Notification of Acceptance

Photomask Japan Program Committee will review all contributed abstracts. Applicants will be notified of acceptance or rejection by e-mail no later than the middle of January 2021.


Please note that the accepted authors should submit their 4-to-6-page manuscript for SPIE Proceedings. The author guidelines for manuscript will be available on this symposium website in January 2021.

Digital Forum Operation

1) Presentation Style

  1. Oral Presentation: Pre-recorded Video Presentation + Live Q&A
  2. Poster: 5 minutes Short Presentation with PDF Material (On-demand only)

2) Program Overall

  • - Program will be organized considering the time zone difference among the presenters.
  • - Video presentation will be broadcasted live according to the program.
  • - Presenters are requested to be online before their video presentation starts to answer the questions in the live Q&A.
    [Note] Audiences will freely ask questions using the chat on the online platform while live broadcasting. Session chairs will pick up some questions for presenters to answer.
  • - On-demand presentation will be also available after live broadcasting.

3) Presentation Materials:

  • - The detailed guidelines will be available later.

For any inquiries about abstract submission, please contact

Photomask Japan 2021 Abstract Submission Office
c/o JTB Communication Design, Inc.
Celestine Shiba Mitsui Bldg., 3-23-1 Shiba, Minato-ku, Tokyo 105-8335, Japan
Fax : +81-3-3452-8550


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