Committees
Advisory Committee
Chair
- Tadahiro Takigawa
- Japan ALITECS Corporation
Members
- Naoya Hayashi
- Japan Dai Nippon Printing Co., Ltd.
- Morihisa Hoga
- Japan National Institute of Advanced Industrial Science and Technology
- Toshiyuki Horiuchi
- Japan Tokyo Denki University
- Masanori Komuro
- Japan
- Masao Otaki
- Japan
- Masato Shibuya
- Japan Tokyo Polytechnic University
- Yoshio Tanaka
- Japan D2S Inc. and D2S K. K.
Organizing Committee
Chair
- Takeo Watanabe
- Japan University of Hyogo
Vice Chair
- Masaru Nakagawa
- Japan Tohoku University
Members
- Akihiko Ando
- Japan Toshiba Memory Corporation
- Uwe Behringer
- Germany UBC Microelectronics
- Junko Collins
- Japan SEMI Japan
- Brian J. Grenon
- USA RAVE LLC
- Hideaki Hamada
- Japan HTL Co. Japan Ltd.
- Eiichi Hoshino
- Japan Nikon Corporation
- Hideaki Mitsui
- Japan HOYA Corporation
- Hiroyuki Miyashita
- Japan Dai Nippon Printing Co., Ltd.
- Junji Miyazaki
- Japan ASML Japan Co., Ltd.
- Warren Montgomery
- USA Irresistible Materials
- Hiroaki Morimoto
- Japan Toppan Printing Co., Ltd.
- Kazuyuki Suko
- Japan Dai Nippon Printing Co., Ltd.
- Kiyohito Yamamoto
- Japan Canon Inc.
- Anto Yasaka
- Japan Hitachi High-Tech Science Corporation
Auditor
- Ichiro Kagami
- Japan Sony Semiconductor Manufacturing Corporation
- Yoji Tonooka
- Japan Toppan Printing Co., Ltd.
Program Committee
Chair
- Akihiko Ando
- Japan Toshiba Memory Corporation
Vice Chair
- Tsukasa Abe
- Japan Dai Nippon Printing Co., Ltd.
- Yutaka Kodera
- Japan Toppan Printing Co., Ltd.
Members
- Hajime Aoyama
- Japan Nikon Corporation
- Minako Azumi
- Japan Nikon Corporation
- Peter Buck
- USA Mentor Graphics Corporation
- Thomas Faure
- USA GLOBALFOUNDRIES Corporation
- Kazuyuki Hagiwara
- Japan D2S K. K.
- Manabu Hakko
- Japan Canon Inc.
- Tetsuo Harada
- Japan University of Hyogo
- Terumasa Hirano
- Japan HOYA Corporation
- Franklin Kalk
- USA Toppan Photomasks, Inc.
- Takashi Kamikubo
- Japan NuFlare Technology, Inc.
- Izak Kapilevich
- USA Applied Materials
- Bryan Kasprowicz
- USA Photronics, Inc.
- Kokoro Kato
- Japan Nihon Synopsys G.K.
- Yusuke Kawano
- Japan Renesas Electronics Corporation
- Byung-Gook Kim
- Korea Samsung Electronics Co., Ltd.
- Taiichi Kiuchi
- Japan JEOL Ltd.
- Yosuke Kojima
- Japan Toppan Printing Co., Ltd.
- Masaaki Koyama
- Japan Sony Semiconductor Manufacturing Corporation
- Yasuyuki Kushida
- Japan Mie Fujitsu Semiconductor Limited
- John Lin
- Taiwan Taiwan Semiconductor Manufacturing Company Ltd.
- Junji Miyazaki
- Japan ASML Japan Co., Ltd.
- Yoshinori Nagaoka
- Japan KLA Corporation
- Patrick Schiavone
- France ASELTA Nanographics
- Tsutomu Shoki
- Japan HOYA Corporation
- Yasunari Sohda
- Japan Hitachi, Ltd.
- Kiwamu Takehisa
- Japan Lasertec Corporation
- Kenichi Tokunaga
- Japan TowerJazz Panasonic Semiconductor Co., Ltd.
- Masami Yonekawa
- Japan Canon Inc.
- Shingo Yoshikawa
- Japan Dai Nippon Printing Co., Ltd.
- Guojing Zhang
- USA Intel Corporation
Steering Committee
Chair
- Kazuyuki Suko
- Japan Dai Nippon Printing Co., Ltd.
Vice Chair
- Takashi Kamo
- Japan Toshiba Memory Corporation
- Kiwamu Takehisa
- Japan Lasertec Corporation
Members
- Tsukasa Abe
- Japan Dai Nippon Printing Co., Ltd.
- Akihiko Ando
- Japan Toshiba Memory Corporation
- Junji Hirumi
- Japan Mie Fujitsu Semiconductor Limited
- Kunihiro Hosono
- Japan Renesas Electronics Corporation
- Kokoro Kato
- Japan Nihon Synopsys G.K.
- Yutaka Kodera
- Japan Toppan Printing Co., Ltd.
- Toshio Konishi
- Japan Toppan Printing Co., Ltd.
- Yasutaka Morikawa
- Japan Dai Nippon Pringing Co., Ltd.
- Naoki Nishida
- Japan HOYA Corporation
- Teruaki Noguchi
- Japan JEOL Ltd.
- Nobuyuki Yoshioka
- Japan Dai Nippon Printing Co., Ltd.
- Shusuke Yoshitake
- Japan NuFlare Technology, Inc.